Introduction产品简介
3M氟化液FC-40是无色透明全氟化学品，具有良好的化学惰性、电气绝缘性能、热传导性和独特的第表面张力广泛应用于半导体制造厂作为热传导介质。其液体温度范围为-57°C 至 155°C，主要应用于蚀刻设备、离子注入设备、测试设备及其他设备。因为FC-40是单一组分，所以其成分不好出现降解或者过期。FC-40沸点高，其随时间的挥发也比较少。
3M Fluorinert Electronic Liquid FC-40 is a clear, colorless, thermally stable, fully-?uorinated liquid ideal for use in many single phase heat transfer applications in the semiconductor manufacturing industry. Its liquid range (-57°C to 155°C) makes it ideal for a variety of applications such as etchers, ion implanters, testers and others. Because Fluorinert liquid FC-40 is primarily a single compound, its composition will not shift or fractionate with time. This keeps fluid loss to a minimum and insures that transport properties will not change with time.
Physical Properties物理化学性质
Properties
FC-40
Appearance外观
无色透明
Average Molecular Weight平均分子量
650
Boiling Point (1 atm)沸点
155℃
Pour Point倾点
﹣57℃
Estimated Critical Temperature最高承受温度
543 K
Estimated Critical Pressure最高承受压力
1180000pa
Vapor Pressure蒸汽压
432pa
Latent Heat of Vaporization (at normal boiling point挥发潜热
68J/g
Liquid Density液体密度
1850kg/m3
Kinematic Viscosity运动粘度
1.8 centipoise
Absolute Viscosity绝对粘度
3.4 centipoise
Liquid Speci?c Heat比热
1100 J/ kg°C
Liquid Thermal Conductivity导热率
0.065 W/ m°C
Coef?cient of Expansion膨胀系数
0.0012 /°C
Refractive Index折光率
1.290
Water Solubility溶水能力
<7 ppm
Solubility in Water水中溶解力
<5 ppm
Ozone Depletion Potential臭氧破坏潜值
0
Dielectric Strength介电强度
46 kV, 0.1" gap
Dielectric Constant介电常数
1.9
Electrical Resistivity绝缘强度
4.0 x 10(15)ohm cm
Not for specication purposes All values determined at 25°C unless otherwise speci?ed